TEL 1181-000284-15 PCB ASSY SG-12700W

TEL 1181-000309-11 PCB ASSY MD1F-0

TEL 1181-000310-13 PCB ASSY WC1F-01A

TEL 1181-000317-14 PCB ASSY

TEL 1181-000336-13 PCB ASSY MC-31078B

TEL 1181-000337-16 PCB,ASSY MC-31049-2

TEL 1181-000566-11 PCB, ASSY MDIF-02A-A MOTOR DRIVER

TEL 1181-00175-16 BOARD 80-2050C

TEL 1181-00211-12 PCB ASSY

TEL 11810001 PCB, CP-8090A

TEL 1185-001021-11 TRAP, VF, INNER ASSY.

TEL 1185-003047-11 MANIFOLD UNIT ME (1058120B)

TEL 118500102013 TRAP, VF, BODY ASSY.

TEL 1187-000182-11 PCB MC-31023

TEL 1187-004746-11 BOARD CIRCUIT RE-8808 FURNACE

TEL 1187-005235-11 CABLE ASSY

TEL 1187-008494-11 TUBE ASSY G6-243*70.5 (SS)

TEL 1187-008496-11 TUBE ASSY G4-249-(S-2)

TEL 1187-017581-11 APC DRIVER PCB UN

TEL 1187-026762-11 FEMALE CONNECTOR..FVM -FC-19-6

TEL 1187-027-852-1 BAND

TEL 1187-027933-13 CO****OLLER UNIT

TEL 1187-028970-16 CO****OLLER UNIT

TEL 1187-030596-11 MANIFOLD, 8S-I-A7-W-S-1

TEL 1187-030879-12 HEATER, 2 1/H, VERTICAL

TEL 1187-040427-12 DRIVER, HF, AUTOSHUTTER

TEL 1187-041131-11 FLANGE END CAP ASSY, LPCVD REA

TEL 1187-042765-11 MANIFOLD, 8SN-R-A5-N-I-1

TEL 1187-042765-11 MANIFOLD, 8SN-R-A5-N-I-1

TEL 1187-043355-12 TUBE ASSY, G4-270

TEL 1187-094864-11 BURN OUT HEATER

TEL 1187-127327-11 OUTSIDE PIPE (P-N2) SUS 1187-127327-11 CTA

TEL 120008151 VALVE,SOL VT307V-5GS-01-F

TEL 1208-001150-11 INDEXER (35427030098)

TEL 121-188 BOARD STAGE TERMINAL

TEL 121-188 BOARD STAGE TERMINAL

TEL 1280-001386-14 HOT CHUCK CO****OLLER

TEL 1286-009274-12 HARNESS 2 MOTOR

TEL 1287-002779-11 JOYSTICK ASSY 80 S/W

TEL 1287-004399-11 UNIT LCD DISPLAY 20S

TEL 1310-392519-11 INNER CUP SKIRT

TEL 1310-496523-16 BLOCK R

TEL 1310-497091-12 STOPPER (8)

TEL 1380-000970-11 MOTOR, C/S AXIS 60W

TEL 1380-001877-11 PLATE OVEN

TEL 1380-002028-11 DRIVER SERVO

TEL 1380-002030-11 DRIVER SERVO

TEL 1380-002052-11 MOTOR DRIVER

TEL 1380-002054-11 MOTOR DRIVER

TEL 1380-002285-11 CHEMICAL FILTER

TEL 1380-002712-11 PUMP.. SB-3SH-M-A

TEL 1380-100344-11 LENS UNIT (HLL302T1)

TEL 1380-100346-11 SENSOR LIGHT GUIDE

TEL 1380-100347-11 SENSOR BOARD INTENSITY

TEL 1380-100351-11 FUSE TEMP

TEL 1380-100355-11 ROTARY SOLENOID

TEL 1380-100389-11 HEATER FOR T H UNIT

TEL 1380-100514-11 DRIVE BELT IF-Y-22-0

TEL 1380-100535-11 PULLEY D(C/S Z BA

TEL 1380-100546-11 BELT

TEL 1380-100550-11 C/S CONNECTOR BAS

TEL 1380-100551-11 NUT

TEL 1380-100622-11 DRIVER SERVO

TEL 1380-100694-11 MOTOR, C/S AXIS 30W

TEL 1380-100840-11 REGULATOR

TEL 1380-100944-12 HUMIDITY SENSOR..SCP

TEL 1380-101130-11 CONNECTOR ASSY VJ10-59-2

TEL 1380-101146-1 FLAT CABLEZ-X

TEL 1380-101173-11 FLAG FOR SENSOR (T170-01330-2)

TEL 1380-101264-11 MOTOR, PINCETTE X AXIA

TEL 1380-101265-11 X HOME SENSOR CS-E-2

TEL 1380-101266-11 X CHECK SENSOR CS-E-25-0

TEL 1380-101267-11 X OUT SENSOR

TEL 1380-101268-11 MAP OUT SENSOR CS-E-27-0

TEL 1380-101269-11 MAP IN SENSOR CE-E-28-0

TEL 1380-101772-11 POD SENSOR ASSY

TEL 1380-101773-11 HOME SENSOR ASSY

TEL 1380-101774-11 UP LIMIT SENSOR ASSY,1380-1017

TEL 1380-101777-11 WAF SENSOR (HORIZON) ASSY

TEL 1380-101784-11 POD LOCK2 SENSOR ASSY

TEL 1380-101788-11 POD UNLOCK2 SENSOR ASSY

TEL 1380-102244-11 DRIVE BELT..IF-Y(HS)-31

TEL 1380-102437-11 FLOAT SW ASSY..SCP-68-1

TEL 1380-102896-11 FAN UNIT

TEL 1380-103172-11 PCB, X, THETA-BASE

TEL 1380-103190-11 DRIVER SERVO

TEL 1380-103256-11 MOTOR, I/F Y AXIS

TEL 1381-644957-16 TVB3101-1 ISC BOARD ASSY

TEL 1381-645294-12 IMC CONN BOARD

TEL 1381-645459-11 3P M/A DRIVER I/F

TEL 1381-645460-12 OPS PANE CONNECTI

TEL 1381-645731-15 I/F CONN BOARD #2

TEL 1381-647411-11 IO DISPLAY BOARD

TEL 1381-647847-15 PCB ASSY

TEL 1381-647967-11 V7.C/S ARM X BOARD ASSY

TEL 1381-647980-12 TVB1202-1/ANET BOARD ASSY

TEL 1381-64968-12 BOARD ASSY

TEL 1381-649902-11 SENSOR BOARD

TEL 1381-650042-11 INDEXER MAPPING BOARD

TEL 1381-650055-11 IMC EXT BOARD

TEL 1381-659042-13 FIRE SIGNAL RELAY BOARD

TEL 1385-391191-13 PINCETTE, M/A

TEL 1385-444840-11 DC MOTOR ( PX243G01-01B )

TEL 1386-100356-11 SOLENOID ROTARY

TEL 1386-443496-12 CABLE, 3P MA8 THETA

TEL 1386-443498-12 M/A THETA MOTOR

TEL 1386-443499-14 MOTOR, M/A Z AXIS

TEL 1386-443501-13 3P MA8 Z MOTOR CABLE

TEL 1386-443503-12 3P MA8 Z BP SENSOR CABLE

TEL 1386-443504-13 X1 SENSOR HARNESS

TEL 1386-443505-13 X2 SENSOR HARNESS

TEL 1386-443507-14 WF SENSOR HARNESS

TEL 1386-443509-13 MOTOR, M/A X AXIS

TEL 1386-443514-11 3P MA8 Z DRIVER SIGNAL CABLE

TEL 1386-443772-11 PIN UP/DOWN SENSOR ASSY

TEL 1386-443921-12 SENSOR CAPACITANCE

TEL 1386-444163-14 W/F EDGE SEN.L SOURCE

TEL 1386-444165-13 WAFER EDGE SENSOR RECIVER

TEL 1386-444165-15 W/F EDGE SENSOR(R

TEL 1386-444208-12 WAFER STAGE SENSOR

TEL 1386-444227-11 CAPACITANCE SENSOR

TEL 1386-444576-12 FAN

TEL 1386-444581-11 RINSE U/D SENSOR

TEL 1386-444607-15 SHUTTER UP/DOWN SENSOR ASSY

TEL 1386-445099-13 CARRIER SENSOR BOARD

TEL 1386-445204-13 FLEX CABLE

TEL 1386-446459-12 SPIN MOTOR CO****OL CABLE (MATSUSHITA)

TEL 1386-447983-11 INDEXER MOTOR ASSY V7

TEL 1386-448371-11 M/A H.S FLEX CABLE

TEL 1386-448386-11 ASSY SPRING

TEL 1386-448392-12 M/A HSY MOTOR ASSY

TEL 1386-448912-11 CABLE, MOTOR, EXT

TEL 1386-450112-13 INDEXER MAPPING SENSOR ASSY

TEL 1386-450142-12 FLAT CABLE

TEL 1386-453040-12 MOTOR SHAFT (MSM021ABF)

TEL 1386-453098-11 POSITION SENSOR

TEL 1386-453643-11 TABOT ARM1 IN/OUT SENSOR HARNESS

TEL 1386-453644-13 TABOT ARM2 UP/DOWN SENSOR HARNESS

TEL 1386-453645-11 TABOT ARM2 IN/OUT SENSOR HARNESS

TEL 1386-458644-11 SMIF ARM X HOME SENSOR ASSY

TEL 1386-459764-11 FLAT 345 CABLE L1950

TEL 1386-459765-11 FLAT 645 CABLE L1950

TEL 1387-432587-11 VALVE SOLENOID

TEL 1393-739729-3 MANOMETER GAUGE

TEL 15030T-11111 PLATE,RF,PC1,REV4

TEL 152-004OK VALVE PNEU NW40

TEL 1520044 SCAN AMP CABLE

TEL 17B4495 FRONT SLIT (R510)

TEL 17B7652 GRAPHITE GROUND ELECTRODE

TEL 180004901 BEARING

TEL 1805-220008-11 WINDOW..VIEW PORT-B(SAME:S3T40

TEL 1805-220014-14 OUTER F/R (8 ORI-FLA)Y

TEL 1805-220135-13 RING, EXT OUTER

TEL 1805-220177-22 RING, SHIELD

TEL 1805-320002-11 HOLDER QUARTZ IEM

TEL 1805-320127-21 BASE RING, INTEGRATED

TEL 1805-320142-11 RING, BASE EXH F/R HOLD

TEL 1805-420008-11 WINDOW, EPD/IE-OX

TEL 181-000450-16 PCB, MC-31039B HSDL GAS VER. 1B

TEL 1810-120415-13 UPPER ELECTRODE BODY

TEL 1810-120531-13 ELECTRODE, UPPER

TEL 1810-120660-13 UPPER ELECTRODE BODY, UNITY 85PE, CP20

TEL 1810-120721-A TEL BOTTOM ELECTRODE

TEL 1810-120721-A4 BOTTOM ELECTRODE

TEL 1810-120900-A8 CHUCK

TEL 1810-120982-11 BOTTOM ELECTRODE

TEL 1810-121051-11 CLAMP RING (OUTER)

TEL 1810-121085-16 ALUMINIUM DEPO SHIELD P/C 1

TEL 1810-121113-13 UEL BODY (UPPER ELECTRODE BODY)

TEL 1810-121244-A1 REPAIR CHARGE

TEL 1810-121299-11 ELECT CHUCK IEM

TEL 1810-121366-11 SHIELD, DEPO

TEL 1810-121429-11 DEPO SHIELD S(C SIC)TYPE2(SAME)

TEL 1810-121900-13 LINER A EXH-Y

TEL 1810-220725-2 EXHAUST RING

TEL 1810-220843-14 VACUUM MANIFOLD(51)

TEL 1810-220986-14 INS GUARD(8K-ESC)

TEL 1810-220998-12 UPPER ELECTRODE PLATE

TEL 1810-221018 RING, P C SHEALD THIN TYPE

TEL 1810-221024-14 UPPER CLEAN PLATE (8K-7A)

TEL 1810-221063-14 RING EXHAUST

TEL 1810-221106-14 CARBON 6"(ESC)

TEL 1810-221329-12 SHIELD RING T78K-160

TEL 1810-221439-25 CRYSTAL ELECTRODE TQM(BK-150)

TEL 1810-221466-12 PLATE COOLING UPPER

TEL 1810-221470-24 ELECTRODE CRYSTAL

TEL 1810-221471-13 ELECTRODE CRYSTAL

TEL 1810-221471-14 ELECTRODE CRYSTAL

TEL 1810-221584-12 PLATE, UPPER COOLING (8K-SI-200)

TEL 1810-221616-12 TRAP (200-S-16)

TEL 1810-221716-11 UPPER ELECTRODE PLATE (FT-3)

TEL 1810-221942-12 AMORPHOUS CARBON

TEL 1810-222433-11 RING, INNER  NW G UP 8

TEL 1810-222435-11 FOCUS RING, QUARTZ, 8K-ESC

TEL 1810-222435-118-220- (8K-ESC) FOCUS RING QUARTZ,1810-222435-118-220-30

TEL 1810-222487-11 SHIELD RING T7(8K-160)

TEL 1810-222662-11/22-EBW-506 SHIELD RING

TEL 1810-222727-11 BAFFLE B

TEL 1810-222728-11 BAFFLE C

TEL 1810-222897-12 NW 31-U (8K-ESC) FOCUS RING (AL)

TEL 1810-222917-11 PROTECT RING2(IEM POLY)

TEL 1810-222956-13 UPPER HOLDER

TEL 1810-222979-12 SHIELD RING

TEL 1810-223063-11 HOLDER UPPER E (TYPE2)

TEL 1810-223101-11 SHIELD BOTTOM A (IEM POLY)

TEL 1810-223147-12 OUTER QTZ WINDOW

TEL 1810-223288-13 MTG FLANGE EXT PLATE (GROUND)

TEL 1810-223497-13 SHIELD BOTTOM B2 (IEM POLY)

TEL 1810-224159-12 BASE A, WINDOW (EPD)(95DI)

TEL 1810-224222-12 UPPER COOLING PLATE

TEL 1810-224506-11 FOCUS RING 6"L AR(8K-ESC)

TEL 1810-224530-11 INNER RING 6J-G-UP-9K-ESC

TEL 1810-224953-12 LINER C GATE CHAM-Y

TEL 1810-224954-11 PLATE COOLING UPPER(T10-215)F

TEL 1810-225157-12 SHIELD RING T5 (8K-160)FP

TEL 1810-322023-11 BELLOWS GUARD RIN

TEL 1810-322044-1 CENTERING W/MESH

TEL 1810-322044-11 CENTERING

TEL 1810-322129-12 EXH RING A (8K-ESC)

TEL 1810-322488-11 GUARD RING (5K1)

TEL 1810-322531-12 RING,GUARD [8K-ESC]

TEL 1810-322767-11 FRANGE, PUSHER

TEL 1810-323129-11 PROTECT RING

TEL 1810-323129-11 PROTECT RING

TEL 1810-323168-11 SIDE WINDOW PLATE (U85P)

TEL 1810-323593-11 WINDOW (IPP)

TEL 1810-323880-13 FOCUS RING(SAME:S3T40396)

TEL 1810-323881-13 FOCUS INNER RING

TEL 1810-323881-14 RING FOCUS INNER 8" NOTCH C

TEL 1810-324461-11 GUARD RING (8K-397.5)

TEL 1810-324676-11 OUTER QUARTZ END WINDOW

TEL 1810-325487-13 F.R COVER (8N-26-C)

TEL 1810-325508-11 ORIFACE WINDOW (IPP)

TEL 1810-325509-13 COVER, SCREW,CELAZOLE

TEL 1810-325569-13 WALL ALUMINIUM CHAMBER (UPPER) (GROUND)

TEL 1810-325570-13 WALLALUMINIUM CHAMBER (LOWER) (GROUND)

TEL 1810-325571-14 CHAMBER ALUMINIUM WALL (R) (GROUND)

TEL 1810-325572-14 CHAMBER ALUMINUM WALL (GROUND)

TEL 1810-326904-12 FOCUS RING ATACHED (8N220 SI-AL (8K-ESC)

TEL 1810-328378-11 PIPE CONNECT, HE, SP (UP)

TEL 1810-329022-13 LONER ADAPTER(AL)TYPE2(SCCM-0X)

TEL 1810-329037-13 LINER B EXH-Y

TEL 1810-329064-12 WINDOW, AL-3-Y

TEL 1810-329078-11 COVER SCREW A-AL-Y

TEL 1810-329079-11 COVER SCREW B-AL-Y

TEL 1810-329229-11 INNER F/R8"NC216 (RS-T4.45)

TEL 1810-424668-11 UPPER ARM WIRE

TEL 1810-424709-11 WIRE 190

TEL 1810-424742-11 SPACER

TEL 1810-424751-11 ATC FLEX PIPINGN

TEL 1810-424884-14 RING,GUARD INSULATOR

TEL 1810-424884-14 RING,GUARD INSULATOR

TEL 1810-424952-13 LIFTER SPRING (8K-ESC)

TEL 1810-424955-11 ROD, RF 8K-ESC

TEL 1810-425088-11 LIFTER STOPPER A (8K)

TEL 1810-425099-12 WAFER LIFTER

TEL 1810-425153-11 MTG PIN (8K-ESC)

TEL 1810-425512-12 CENTERING PIN 2

TEL 1810-425600-11 STOPPER (DEPO SHIELD)

TEL 1810-425601-11 STOPPER SCREW (DEPOSHIELD)

TEL 1810-425704-12 CLOAK LAMP A

TEL 1810-425705-12 CLOAK LAMP B

TEL 1810-425994-11 TEMP SENSOR HOLDER(KI)

TEL 1810-426117-11 SHAFT, CLAMP SUPPORT D

TEL 1810-426423-11 ATC TRAP PLATE SCREW

TEL 1810-426760-11 WINDOW, SIDE

TEL 1810-427135-11 PIN (4X15)  IS AN ALTERNATIVE)

TEL 1810-427899-12 DEPO SHIELD H=70 ALUMINA

TEL 1810-428078-12 STOPPER LIFTER

TEL 1810-428129-11 WIND SHIELD

TEL 1810-428390-11 BAFFLE A

TEL 1810-428436-11 END POINT WINDOW TEFLON SCREW

TEL 1810-428520-12 BOTTOM EL PIN (0.5)

TEL 1810-428720-12 PIN POSITIONING (IEM POLY)

TEL 1810-429708-11 WIRE (260)K8

TEL 1810-429709-11 WIRE (276)K8

TEL 1810-429712-11  (PIN (4X17) IS AN ALTERNATIVE)

TEL 1810-429803-11 GATE RETURN SPRING P

TEL 1810-429841-11 BUSH RING SHIELD

TEL 1810-429842-11 SCREW SET SHIELD (OLD P/N 1810-428864-11)

TEL 1810-430545-12 HANDLE, EXH

TEL 1810-430589-11 PLATE WINDOW

TEL 1810-430590-11 MESH WINDOW(EPD)(95DI)

TEL 1810-430592-11 WINDOW, UV CUT FILM

TEL 1810-430766-11 CAP SCREW (M6-ESC) (TYPE2)

TEL 1810-430782-11 CLT GAS INLET JOINT TOP B(STD)

TEL 1810-430809-11 SPRING, LIFTER C

TEL 1810-431219-11 PIN LOCATE CENTERING(EPD)

TEL 1810322489-12 CERAMIC FOCUS RING

TEL 1820-00024R PCB SYS 386/33MHZ

TEL 1880-020094-16 MATCHER MFM-20SA2 (189502009413

TEL 1880-026696-12 AMORPHOUS CARBON

TEL 1880-026779-12 AMORPHOUS CARBON

TEL 1880-026855-11 MECHANICAL SEAL

TEL 1880-027021-12 BELLOWS SN4730000-3

TEL 1880-028435-12 RF MATCHING UNIT

TEL 1880-26785-21 AMORPHOUS CARBON

TEL 1881-022021-13 AGV5W I/F BOARD

TEL 1881-022036-32 PCB OPE-PANE SW BOARD (DTM)

TEL 1881-022117-26 PCB TSBC-V30B(MAIN)K8 (ATM/MAIN 08)

TEL 1881-022117-27 PCB TSBC-V30B(MAIN)K8 (ATM/MAIN 08)

TEL 1881-022139-12 PCB H/A INTCON BOARD 2 (ATM)

TEL 1881-022143-12 PCB P/A CO****OL BOARD 2(ATM)

TEL 1885-020003-12 B. E. (6") ASSY

TEL 1885-020964-14 RING, P C SHEALD THIN TYPE

TEL 1885-022352-14 BOTTOM ELECTRODE

TEL 1885-023137-17 ELECTRODE BOTTOM

TEL 1885-023937-11 ELECTRODE ASSY..BOTTOM (6"-5KB)

TEL 1885-024611-12 PLATE, INPUT RF

TEL 1885-024612-12 PLATE, GROUND

TEL 1885-024718-11 C P/C RING (85-T7-220-CZ)

TEL 1885-026690-11 HOLDER, WAFER

TEL 1886-455194-11 H/AX MOTOR ASSY

TEL 1886-455293-11 SENSOR MOTOR ASSY

TEL 1886-459396-12 SENSOR ASSY PTL/L1

TEL 1887-422021-11 P/C WINDOW HETERASSY

TEL 1902-411203-12 MOTOR PULLEY

TEL 1902-411263-11 MOTOR PULLEY(S3M20F)

TEL 1904-300052-13 SIDE PLATE (R)

TEL 1904-300053-13 SIDE PLATE (L)

TEL 1904-400031-11 SPACER GUIDE 7.8

TEL 1910-110960-11 BASE UNIT

TEL 1910-315920-12 DAMPER

TEL 1910-317263-12 GUIDE PIQ

TEL 1910-317659-17 NOZZLE BATH, 8 INCH

TEL 1910-318300-11 WAFER GUIDE (6")

TEL 1910-318771-13 GAP SPACER(8")

TEL 1910-319994-11 AL COVER U

TEL 1910-319995-11 AL COVER T

TEL 1910-321310-13 GUIDE (L)

TEL 1910-321311-13 GUIDE (R)

TEL 1910-418164-13 DAMPER SHUFT

TEL 1910-418203-12 NOZZLE BRACKET 2

TEL 1910-418217-12 PACHING

TEL 1910-422378-11 WAF GUIDE (6")

TEL 1910-424625-12 PULLEY SHAFT

TEL 1910-425777-1 PIN

TEL 1910-428916-11 CHIP GUIDE

TEL 1910-429087-12 NOZZLE HOLDER

TEL 1910-429745-12 NOZZLE, HOLDER

TEL 1910-430884-12 TUBE CONNECTER

TEL 1910-433828-11 PIN

TEL 1910-435937-11 BLOCK IDLE

TEL 1910-442219-11 VAC SEAL TOOL

TEL 1910-449604-11 BLIND

TEL 1910-457427-11 BUFFER

TEL 1910-457558-11 WAFER GUIDE

TEL 1920-411191-11 PULLY

TEL 1981-603313-11 LED DISPLAY BOARD

TEL 1981-607041-13 STEP5 MOTOR DRIVE BOARD

TEL 1981-607569-11 PCB, USER BOARD ASSY

TEL 1985-41190-13 8" COATER CATCH CUP ASSY

TEL 1985-414025-11 I/F GAP PIN ASSY

TEL 1985-416828-11 CENTERING JIG 6 INCH

TEL 1985-425503-12 PIN (AD) 7" (PACK OF 6)

TEL 1985-425512-13 8" PIN SET ASSY

TEL 1986-401324-11 8 COL PIN UP SENSOR ASSY L200

TEL 1986-401325-11 8 COL PIN DOWN SENSOR ASSY L200

TEL 1986-416108-11 AC CABLE OLF 2.5SQ:3C SS

TEL 1986-421055-1 M/A WAFER SENSOR ASS

TEL 1987-410294-11 M/A S.S Z COIL SPRING

TEL 1987-411444-11 ASSY, 3P M/A S.S Z

TEL 1987-411593-12 SERVO DRIVER

TEL 1987-423370-1 SWITCH EMO BOX

TEL 1B05-100148-14 COOLING HOSE(8)

TEL 1B05-100149-13 HOT DIW TANK

TEL 1B05-100214-12 GUIDE,WAF200Z MS 8 CHUCK

TEL 1B05-100260-11 8BOAT (QZ)

TEL 1B05-100271-11 6" CHUCK(QZ)-52

TEL 1B05-100288-11 6" BOAT(QZ)-52-H.

TEL 1B05-100327-11 8BATH QDR TYPE-E(NS)

TEL 1B05-100354-12 8 BATH FR TYPE-E (MG)

TEL 1B05-200040-13 FLUME(8 INCH-N)

TEL 1B05-200045-14 DRAIN RECEIVING TRAY(GS)

TEL 1B05-200052-12 8 BAFFLE QZ(TYPE-C)

TEL 1B05-200084-11 8BAFFLE QZ(TYPE-B-S)-2

TEL 1B05-200090-11 6" BAFFLE SPM

TEL 1B05-200095-11 6" BAFFLE QZ

TEL 1B05-300046-12 SUB FLUME (8-A)

TEL 1B05-300047-12 SUB FLUME (8-B)

TEL 1B05-300048-12 SUB FLUME (8-C)

TEL 1B05-300049-12 SUB FLUME (8-D)

TEL 1B05-300071-11 PUNCHING PLATE(AP

TEL 1B05-400065-11 SENSOR GLASS

TEL 1B05-400078-11 QUARTZ PIPE(150)

TEL 1B81-001551-11 LS CN BOARD

TEL 1B81-010067-16 N2 SENSOR BOARD

TEL 1B81-010123-16 PCB BOARD

TEL 1B81-010267-13 P064 BOARD CIRCUIT

TEL 1B81-010273-14 C2H INTLK BOARD

TEL 1B86-030137-12 W/TRA DRV ZE CABLE 4

TEL 1B86-032474-13 INDEXER POSI SENS ASSY

TEL 1B86-032475-13 INDEXER SENS ASSY

TEL 1B86-032669-14 INDEXER CAR SENS(T) ASSY

TEL 1B86-032670-14 INDEXER CAR SENSASSY

TEL 1B86-032673-12 INDEXER POD LK SENS ASS

TEL 1B86-032674-12 INDEXER POD ULK SENS ASSY

TEL 1B86-032677-14 INDEXER CONN BRD CABLE

TEL 1B86-034056-17 INDEXER POD LK SENS ASSY-R

TEL 1B86-034057-17 INDEXER POD ULK SENS ASSY-R

TEL 1B86-035917-12 INDEXER POD CHECK RBT-CABLE

TEL 1B86-035918-12 INDEXER LATCH RBT-CABLE

TEL 1B87-512644-11 ASSY, SMIF TABLE

TEL 1D05-300040-13 RING,INSULATOR, C, (DRM2) QUARTZ

TEL 1D05-300052-11 RING INSULATOR A7

TEL 1D05-300053-14 RING.INSULATER B2(DRM2)

TEL 1D05-300185-13 RING INSULATER A7(HF1 0)(DRM2)

TEL 1D05-400022C14 WINDOW SHIELD DEPO (DRM2)

TEL 1D08-000321-11 BOARD TYB422-1

TEL 1D10-100075-14 BAFFLE PLATE LEVEL 5 (PC-3)

TEL 1D10-100327-13 PLATE

TEL 1D10-100582-14 ELECTRODE BOTTOM

TEL 1D10-100938-12 RF PLATE,PC1 (DRM2)

TEL 1D10-100938-12 RF PLATE,PC1 (DRM2)

TEL 1D10-101111-11 PLATE, RF, P2C, (DRM2)

TEL 1D10-101111-11 PLATE, RF, P2C, (DRM2)

TEL 1D10-101965-12 ELECTRODE BOTTOM, 8N-L2 (88DRM

TEL 1D10-102521-12 SHIELD DEPO UPPER-Y

TEL 1D10-200704-14 UPPER EL-BASE 1

TEL 1D10-200733-11 SHIELD RING (DRM2)

TEL 1D10-200734-14 COVER BELLOWS A

TEL 1D10-200921-12 DEPO, SEALD P1

TEL 1D10-200922-12 SHIELD, DEPO, P2

TEL 1D10-201429-15 UPPER,ELECTRODE R1

TEL 1D10-202177-12 UPPER ELECTRODE A-1 (DRM2)

TEL 1D10-301273-12 SHUTTER (LV-5)

TEL 1D10-302209-14 FOCUS RING

TEL 1D10-302791-12 RING, F-8J-SIC-260-3.4 (DRM2)

TEL 1D10-302869-11 PIN, BUSHER

TEL 1D10-303124-14 SHIELD DEPO 85-2(DRM2)

TEL 1D10-303124-16 SHIELD,DEPO 85-2

TEL 1D10-304010-11 RING,SHIELD B3

TEL 1D10-304010-12 RING..SHIELD,B3,(DRM2)

TEL 1D10-311758-11 RING, BELLOWS LOWER

TEL 1D10-312637-11 COVER BEL-L2 (C-ESC) (DRM2)

TEL 1D10-328005-11 COVER, PROTECT, ESC

TEL 1D10-401049-1 SCREW CAP PTFE (UNITY)

TEL 1D10-401722-11 COVER,BEL(DRM)

TEL 1D10-401952-11 PLATE STOPER PIN

TEL 1D10-403321-11 WINDOW SPACER M8

TEL 1D10-404153-11 EDGE PRESSURE CERAMIC SLEEVE

TEL 1D1O-312197-11 RING F-8SO-SIC (A B)

TEL 1D80-000759-11 BURRERFLY VALVE

TEL 1D80-002363-12 GATE VALVE

TEL 1D80-002513-14 REMOTE CO****OL BOX

TEL 1D80-003507-21 AUTOMATIC MATCHING NETWORKMW2-30

TEL 1D80-003885-11 PCV..UPC-4JR-L124-C13S

TEL 1D80-004122-17 WMN-30F BOTTOM MATCHER OF  85 SCCM 2Mhz.

TEL 1D81-000120-1 PCB ASSY

TEL 1D81-000141-21 TYB41E-2 TMP BOARD

TEL 1D81-000303-18 PCB, TYP131-1/ILK

TEL 1D81-000304-31 BOARD  I/F PRESSURE SWITCH

TEL 1D86-000172-91 RF CABLE (P/C3)

TEL 1D86-003596-12 HEAT:PC:PC1 WALL RR ASSY

TEL 1D86-003620-13 TC

TEL 1D86-003781-13 ASSY, BTM

TEL 1D86-003946-14 CA: MAIN: PC1DCPWR (CABLE)

TEL 1D86-004229-13 CABLE,PC,PC2,BTM.PANEL

TEL 1D86-004358-13 TC, UNITY2

TEL 1D86-006871-41 CA:OUT:PC1:XINIX SCAN

TEL 1D86-006873-41 CA:OUT:PC1:XINIX DET1

TEL 1D87-000340-11 STD P/C2 CYLINDER

TEL 1IH0012710 MICRO PHOTO SENSOR

TEL 1JK0013000 OPTICAL FIBER CABLE

TEL 1M10-101054-12 6" ANODE

TEL 1M10-101054-12 6" ANODE

TEL 1M10-202045-13 ELECTRODE UPPER

TEL 1M10-303699-11 LIFTER PIN, TEFLON COATED

TEL 1M81-022067-11 CPU BORAD

TEL 1M87-000305-11 RECIPE MODULE VER.2

TEL 1N10-400438-1 SCREW CAP (M4)

TEL 1N10-401061-11 HOLDER CAP SCREW

TEL 1N10-401561-12 VACUUM SCREW M6X25(AL)

TEL 1N10-401834-11 GAS INLET

TEL 1N10-402078-11 VACUUM SCREW M6X16

TEL 1N10-402079-11 AL SCREW M4X8

TEL 1N10-402337-11 LOCATING PIN

TEL 1N10-402384-11 SCREW CAP M5 (2) (PTFE)

TEL 1N10-402385-11 SCREW CAP M6 (2) (PTFE)

TEL 1N10-402473-11 DEPO SHIELD (ES)

TEL 1N10-403168-12 PORT SLEEVE (2-7)

TEL 1N86-431263-11 MOTOR ASSY,SDR STG-X(SD14)

TEL 1PS0005000 POWER SUPPLY EPD-

TEL 1PS0016500 POWER SUPPLY (ET-5B)

TEL 1PS0019890 MFC POWER SUPPLY

TEL 1PS0031810 POWER SUPPLY(SD-21A),FOR(BE-727)

TEL 1SU0004000 LMT SWITCH

TEL 1V10-361804-11 CERAMIC BLOCK

TEL 1V10-361804-12 NTF FARADAY INSULATOR

TEL 1V10-463635-1 XP LINER CAP SCREW(M4*65.8)

TEL 1V86-346055-11 CA. ASSY WIDE BIAS F/THRU

TEL 2-140V747-75 O-RING,027-100165-1

TEL 2-AJ-80179-1 SPIN CUP (LOWERASSY,200mm)

TEL 2-FI-30946 SPIN CUP LOWER

TEL 20-000012 SCREW CAP M3X12 SUS304

TEL 20-0550 THERMOCOUPLE GAUGE TUBE

TEL 20-0550 ANE TC GAUGE TUBE 20-0550 ANE

TEL 20033101 UNITY LOADLOCK DOOR

TEL 200998 CHAIN DRIVE BELT

TEL 201HS-D2 HIGH PRESSURE LAMP

TEL 2024-003015-1 SPEED CO****OLLER, AS2201F-01-04

TEL 2040-000228-1 MOTOR DRIVER, AK-BK551C

TEL 204090 QUARTZ MOUNTING PLATE

TEL 2102-420430-11 BEARING

TEL 2105-120178-11 TUBE, PROCESS, A858

TEL 2105-120548-51 QUARTZ, FIN PEDESTAL

TEL 2105-220154-11 BASE,PEDESTAL GATE

TEL 2105-220155-11 COVER,PEDESTAL GATE

TEL 2105-220834-11 QUARTZ RING

TEL 2105-320040-13 COVER,PEDESTAL GATE

TEL 2105-320185-11 QUARTZ, BASE 12

TEL 2105-420062-11 GATE,QUARTZ,POSITIONING

TEL 2105-420384-31 QUARTZ INJECTOR

TEL 2105-420416-51 QUARTZ INJECTOR

TEL 211-462431-11 CABLE CLAMP

TEL 2110-223783-11 HEAT INSULATOR (1)

TEL 2110-223784-11 HEAT INSULATOR (2)

TEL 2110-324792-12 FLEX, TUBE (N2)

TEL 2110-325280-12 ASSY, TUBE, FLEX. 1/4"

TEL 2110-330148-11 SPACER,TEFLON

TEL 2110-332335-11 FLANGE, WATER COOLING (UNDER)

TEL 2110-338369-11 STRAIGHT PIPE FROM ELBOW TEL FURN

TEL 2110-339633-11 PANEL HEATER

TEL 2110-339634-11 PANEL HEATER

TEL 2110-348521-12 PANEL HEATER.FZ-41 1/4"V WITH FUSE

TEL 2110-348937-12 PANEL HEATER.FZ-41 1/4"V WITH FUSE

TEL 2110-421831-12 LABYRINTH SEAL,INNER

TEL 2110-430534-11 COLOR (1)..PTFE

TEL 2110-430535-11 COLOR (2)..PTFE

TEL 2110-430536-11 COLOR (3)..PTFE

TEL 2110-462324-11 TAPE　HEATER

TEL 2181-020009-13 PCB ASSY STC-C

TEL 2181-020010-13 PCB ASSY STC-P

TEL 2181-020014-13 PCB ASSY F/C-DSP

TEL 2181-020016-11 PCB ASSY SNS B

TEL 2181-020017-11 PCB ASSY

TEL 2181-020023-13 PCB ASSY ALM-ST1

TEL 2181-020025-11 PCB ASSY SNS I/L

TEL 2181-020026-13 PCB ASSY MT-I/L

TEL 2181-020033-11 PCB ASSY MECH-I/L

TEL 2181-020036-11 PCB ASSY OPDD;IW

TEL 2181-020039-11 PCB ASSY SNS B-2

TEL 2181-020041-1B PCB ASSY, MC-31050P-I

TEL 2181-020056-1C PCB, GAS, FIRMWARE, I/L

TEL 2181-020057-13 PCB, PWR SUPPL CONT GAS DETECTOR

TEL 2185-024028-15 ASSY,FLEX,1/4 MARKING S (PACK OF 2)

TEL 2185-027393-11 ASSY,MANIFOLD UNIT,R

TEL 2185-027981-11 MANIFOLD UNIT SIN

TEL 2185-033510-16 ASSY, INNER TUBE TRAP

TEL 2185-033652-11 COLD TRAP BODY RWK

TEL 2187-108750-11 MANIFOLD, 8S-R-AO-W-I-1

TEL 2187-108751-11 MANIFOLD, 8SN-R-A6-W-I-1

TEL 2187-108961-11 MANIFOLD

TEL 2187-150087-11 CERAMIC CLAMP

TEL 22110-324790-12 ASSY, TUBE, FLEX. 1/4"

TEL 23-020624 REV3 FIRE DETECT MAIN CPU BOARD

TEL 23-020627 R**** LED DISPLAY BOARD FIRE DETECTION

TEL 23-030632 REV1 FIRE DETECTION CONNECTION BOARD

TEL 23114-001-5011 TRANSFORMER 118V50/60

TEL 234117 ORING SILICON VACUUM CHUCK

TEL 234118 ORING SILICON VACUUM CHUCK

TEL 234124 ORING SILICON VACUUM CHUCK

TEL 240-000648-1 FLOW METER P-500-1LPA-H2O-15L

TEL 240035781 FILTER CEP-TM1S-VR

TEL 24821 PCB GRAPHIC LCD DRIVER

TEL 249-9200 POTENTIOMETER

TEL 25007-106 PCB LASER DRIVER

TEL 26054K4079 O-RING,KALREZ,027-001397-1

TEL 265-336 LT1085CT OBJECTIVE LENS VOLTAGE REGULATOR

TEL 270013901 GASKET

TEL 2805-106655 FILTER ASSY

TEL 281-600223-3 A-L Z LIMIT SWITCH

TEL 281-600601-1 HEX LIMIT SENSOR

TEL 283191 LIP SEAL FOR NEW STYLE END EFFECTOR

TEL 2835-5297 QUARTZ FIBRE 3X72.8M

TEL 28483232 IRRADIANCE AMPLIFIER FILTERS

TEL 286-000964-1 UP ARM MOTOR

TEL 286-000965-1 DOWN ARM MOTOR

TEL 287-000769-1 X MOTOR ASSY

TEL 287-000771-1 X MOTOR ASSY

TEL 287-002337-5 80E HOT CHUCK POWER

TEL 29041B DIFFUSION LINE HEATER

TEL 2910-207103-11 CUP INNER

TEL 2910-22077-12 CHAMBER

TEL 2910-290041-12 8" TWEEZER

TEL 2910-321966-12 STF121 CWD DISK

TEL 2910-324012-11 TUBE

TEL 2910-399191-11 HOLDER(12),FBR

TEL 2910-400200-12 PIN (ACT 8)

TEL 2910-400229-12 PIN

TEL 2910-400884-13 PIN

TEL 2910-400909-1 TUBE SOLVENT (0-3-110) (ACT 8)

TEL 2910-401736-12 PIN

TEL 2910-403787-12 8" ACT PIN (ADH)

TEL 2910-404308-12 POSITION PIN

TEL 2910-415900-11 PIN

TEL 2910-490019-11 POSITIONING PIN

TEL 2910-494964-11 PROBE

TEL 2911-000008-11 FLANGE,

TEL 2940-000022-11 MOTOR DRIVER

TEL 2980-090718-11 SPIN CHUCK

TEL 2980-090819-11 SERVO MOTOR.  (ACT 8)

TEL 2980-091812-11 CHEMICAL CONN BOARD

TEL 2980-106276-11 FLOAT SW ASS  CF-0354

TEL 2980-190355-11 UV SENSER

TEL 2980-190356-11 UV SENSOR US365T

TEL 2980-191730-11 MOTOR DRIVER, MSD261YT

TEL 2980-193265-11 BELT

TEL 2980-193267-11 PULLY ASSY

TEL 2980-193268-11 IDLER,TENSION

TEL 2980-193305-11 BELT

TEL 2980-193308-11 PULLY(HOME)

TEL 2980-193348-11 LINE 8,9,10 CABLE

TEL 2980-193373-11 THEATA MOTOR ASSY

TEL 2980-195729-11 PULLY(END)

TEL 2981-600589-11 CHEMICAL I/O BOARD SP003

TEL 2985-401528-13 Z DRIVE PULLEY ASSY

TEL 2985-402390-14 300CC L/E TANK

TEL 2985-429601-12 IRA FORK ASSY ACT12

TEL 2985-479717-13 PULLEY ASSY(ACT12),X DRIVE

TEL 2985-479717-14 PULLEY ASSY(ACT12), X DRIVE

TEL 2985-479718-14 PULLEY ASSY(ACT12) ,X IDLER

TEL 2985-479721-12 PULLY ASSY(ACT12),Z ID LER

TEL 2985-485085-11 BLOCK ASSY,12INCH

TEL 2985-485128-12 BLOCK ASSY,12INCH

TEL 2986-400319-12 X-MOTOR ASSY (ACT 8)

TEL 2986-400395-12 SCAN ARM MOTOR (ACT 8)

TEL 2986-400506-11 CT CHANGER MOTOR ASSY (ACT 8)

TEL 2986-400570-11 DO EXT CABLE No.6

TEL 2986-4008235-13 12 DEV CHK U/D SENSOR ASSY

TEL 2986-400834-13 12DEV CHK U/D SENSOR CABLE

TEL 2986-401149-13 FAN (109P0424H3D01)

TEL 2986-401217-12 ASSY, 8" BELT SENSOR

TEL 2986-402779-16 CAPACITANCE SENSOR

TEL 2986-408952-W1 CABLE, 1500, M4P-M3J

TEL 2986-409039-11 LEAK SENSOR ASSY

TEL 2986-419488-W1 CABLE, #2, 4000, M3P-M3J

TEL 2986-419545-W1 CABLE, #2, 3000, M3P-M3J

TEL 2986-419594-W1 CABLE, 4000, M4P-M3J

TEL 2986-427126-11 SENSOR PHOTO 8 IRA L #001 330

TEL 2986-427128-11 SENSOR PHOTO 8 IRA D #001 140

TEL 2986-430491-W1 CABLE, #2, 1500, M3P-M3J

TEL 2986-434506-W1 CABLE, #2, 2500, M3P-M3J

TEL 2986-438957-W1 CABLE, #1, 600, M3P-M3P

TEL 2GN60K GEAR HEAD

TEL 2K070-010AN RADIAL BEARING MGC42100-7

TEL 2T3-4040-000 ALUMINIUM WAVERING (ORDERED IN 5/SET)

TEL 3-827667-14 O-RING

TEL 3-827667-16 O-RING

TEL 3-827667-18 O-RING

TEL 3-827674-17 O-RING

TEL 3-831868-01 QUARTZ PLATE

TEL 3-831868-01 QUARTZ PLATE

TEL 3-832776-03 O-RING

TEL 3-837424-05 O-RING

TEL 3-837424-07 O-RING

TEL 301-336.801-014 RUBBER JOYSTICK NEW

TEL 301-364.200-000 WAFER SENSOR TRANSMITTER

TEL 301-364.202-000 WAFER SENSOR RECEIVER

TEL 301-364.203-000 WAFER SENSOR AMPLIFIER

TEL 302-013090-024 CONNECTOR

TEL 302-077.001-003 EMITTER

TEL 302-490108-1 PULLEY (SMALL)

TEL 307-144.001-008 LAMP ASSY

TEL 3083160 RELAY,TEMP,CO****OL

TEL 310-111271-03 BASE, DEV

TEL 310-111550-04 COATER BASE

TEL 310-216120-1 SHUTTER BASE

TEL 310-290498-1 SPIN CHUCK 6

TEL 310-290647-7 PINCETTE CERAMIC ARM

TEL 310-290659-4 I/F PINCETTE

TEL 310-312106-3 KNIFE EDGE RING

TEL 310-313986-1 UPPER CUP (A)

TEL 310-316008-2 UPPER RING

TEL 310-316008-2 UPPER RING

TEL 310-332086-01 NOZZLE PLATE

TEL 310-332521-1 UPPER CUP

TEL 310-344509-1 UPPER RING (POSI)

TEL 310-346181-2 THERMO CONNECTOR NOZZLE

TEL 310-390483-4 PANEL COVER

TEL 310-390507-1 T.S.R NOZZLE

TEL 310-390767-3 8" EDGE RING

TEL 310-390767-4 KNIFE EDGE RING

TEL 310-390769-3 8" NOZZLE RING

TEL 310-391866-2 ARM SIDE RINSE

TEL 310-400116-2 MORTOR PULLY

TEL 310-405623-3 VANE LIMIT (A)

TEL 310-411131-1 SLIDE SENSOR

TEL 310-411182-1 PULLEY

TEL 310-411183-2 SHAFT(2)PULLEY MK2

TEL 310-411508-1 BRACKET MOTOR COOLING UNIT MK2

TEL 310-411843-1 INNER RING

TEL 310-412110-1 PULLEY SHAFT

TEL 310-412226-1 SHAFT(1)PULLEY MK2

TEL 310-415664-1 PULLEY

TEL 310-426697-2 6" INNER CUP STANDARD

TEL 310-428311-1 WAFER GUIDE

TEL 310-428537-3 ROLLER TRM COT09X

TEL 310-449080-3 TIMING PULLEY

TEL 310-461746-3 NOZZLE,ARM

TEL 310-474688-2 FITTING BLOCK

TEL 310-475341-2 FITTING HANDLE

TEL 310-490073-1 NUT PLATE

TEL 310-490090-2 PULLEY COLOR

TEL 310-491063-1 PACKING

TEL 310-492369-1 VAC SEAL CASE

TEL 310-492370-1 VAC SEAL PRESSURE

TEL 310-492473-1 HEAD COVER HINGE (TOKYO ELECT)

TEL 310-492474-1 HINGE PLATE (TOKYO ELECT)

TEL 310-492476-1 STAY PIN (TOKYO ELECT)

TEL 310-492970-1 8" LOWER CUP PARKING

TEL 310-493565-1 PACKING

TEL 310-493566-1 PACKING

TEL 310-493599-4 BOLT, STOPPER

TEL 310-494362-1 M/A TEFLON FINGER

TEL 310-495001-1 ROD COLOR

TEL 310-495292-1 ADJUSTING SCREW

TEL 310-495511-2 PINCETTE SUPPORT VU-106 NCR-68-2

TEL 310-495768-2 BRACKET FIBER

TEL 310-495865-1 NOZZLE BEAM

TEL 310-496056-2 SENSOR, BRACKET C

TEL 310-496436-2 SHAFT (A

TEL 310473587-3 WAFER GUIDE

TEL 321-8-X-1DFR FLEX WELDMENT BARATR

TEL 3281-000020-13 FFC PINCETTE 1-2FLAT CABLE

TEL 3320900 ASSY, CABLE

TEL 341C0001-01 NOZZLE FLUID FC-20 FAN SPRAY

TEL 341C0005-03 NOZZLE N2 360/70/80

TEL 3540K012C-145 MOTOR WITH GEARBOX

TEL 3540K012C-177 DRIVE MOTOR LIFT 020-610.807-008PLR

TEL 380-000139-1 CIRCULAR HOT PLATE (MK-II) HP-F-SPB-N

TEL 380-090044-1 SERVO DRAWER

TEL 380-090070-1 SUPER FITTING INSTER 1/4  (380-090070-1)

TEL 380-090079-1 SLEEVE INSERT JIG ST-D

TEL 380-100028-2 SHUTTER ROTARY SOLENOID UNIT

TEL 380-100124-1 SWITCH FLOAT

TEL 380-100126-1 SWITCH FLOAT

TEL 3802-420027-11 BEARING

TEL 3802-420073-11 BEARING

TEL 3802-420075-11 BEARING

TEL 3802-420078-11 BEARING

TEL 3802-420079-11 BEARING

TEL 3802-420080-11 BEARING

TEL 3802-420083-11 BEARING

TEL 3802-420088-11 BEARING

TEL 381-400198-1 SCRUBBER CONNECTOR B.

TEL 381-500066-3 BULK HEAD MOTHER BD

TEL 381-500066-3 BULK HEAD MOTHER BD

TEL 381-500066-6 IND BULK HEAD MOTHER BD

TEL 381-500221-1 6" OVEN PREAMP BOARD

TEL 381-500221-2 BOARD, 6" OVEN PREAMP

TEL 381-500244-3 16K MEMORY BOARD

TEL 381-534239-1 PCB

TEL 381-534240-1 CPU 1 BOARD

TEL 381-539103-4 M/C KEY I/F BRD A

TEL 381-600039-5 PCA LIMIT SENSOR

TEL 381-600090-1 6" LIMIT SENSOR P.C.A

TEL 381-600090-3 LIMIT SENSOR

TEL 381-600196-9 SCR I\0 BOARD

TEL 381-600209-C ALARM ANALYZER I/0 BOARD

TEL 381-600218-C ALARM ANALYZER CPU BOARD

TEL 381-600222-2 OVEN CONNECTION PCB

TEL 381-600222-9 OVEN CONNECTION BOARD

TEL 381-600223-9 OVEN CPU BOARD

TEL 381-600230-8 SPINNER MOTHER BOARD

TEL 381-600245-2 PCB ASSY

TEL 381-600290-7 HP AD CONNECTION BOARD

TEL 381-600318-4 M/C DI24 BOARD

TEL 381-600337-5 INDEXER CPU BOARD

TEL 381-600338-3 INDEXER I\0 - BOARD

TEL 381-600720-2 PCB

TEL 381-639006-4 PCB, SMC-C85A

TEL 381-639007-5 BOARD IND CONNECTION

TEL 381-639008-3 B/D C/S CONNECT B

TEL 381-639052-4 M.A CONN BRD C ASSY

TEL 381-639067-2 WAFER TRACK (MARK V)

TEL 381-639094-8 PCB, VME-UIO

TEL 381-639101-4 BOARD VIO CONN BR

TEL 381-639101-5 UIO CONNECTION BOARD ASSY

TEL 381-639102-2 BOARD TEMP CONNCT

TEL 381-639102-3 TEMP CONN CRD

TEL 381-639102-9 M/C CONNECTION BRD ASSY

TEL 381-639176 OVER HEAR ALM BOARD

TEL 381-639176-7 BOARD OVER HEAT A

TEL 381-639227-3 SCAN ARM SENSOR BRD

TEL 381-639332-6 MAP TERMINAL BRD ASSY

TEL 381-639332-6 MAP TERMINAL BRD ASSY

TEL 381-639378-3 STAGE TERMINAL BOARD ASSY (COATER MARK V)

TEL 381-639383-2 SSMC-8A

TEL 381-639469-2 PCB MARKS DUMMY

TEL 381-639507-3 WAFER TRACK (MARK V)

TEL 381-639513-1 68KSV CONNECTOR,B

TEL 381-639514-2 SSMC-8B

TEL 381-640804-9 BOARD LED DISPLAY BRD

TEL 381-640841-4 TVME-68KSF ASSY

TEL 381-640994-3 UNIT I/O BRD 2

TEL 381-641080-7 UIO/A BOARD

TEL 381-641135-2 UIO/A CON BRD

TEL 381-641739-9 EEW UNIT BOARD

TEL 381-642277-3 TEMP CONN BRD ASS

TEL 381-642664-1 UIO/BS CONN. BOARD

TEL 381-643238-6 BOARD CONNECTION M/A

TEL 3810-329659-21 BRACKET

TEL 3810-420337-11 RETAINER,REACTOR,SUS316L

TEL 3810-422311-11 SCREW SET M6*20

TEL 3810-423848-11 MOUNT MOTOR

TEL 3810-424115-12 SCREW

TEL 3810-424200-11 SCREW M5*6 PEEK

TEL 385-302472-2 CABLE, ASSY, 6"

TEL 385-303511-5 LIQUID END DETECTOR

TEL 385-332398-4 CLAMP

TEL 385-332650-4 DIP DEP POSI DEV BACK RINSE

TEL 385-335707-4 DIP DEV VAC PIPING

TEL 385-390555-3 6" PINCETTE P ASSY

TEL 385-390646-8 MIST TRAP ASSY

TEL 386-400535-2 STEPPING MOTOR ASSY

TEL 386-400536-2 STEPPING MOTOR CABLE

TEL 386-400538-2 INDEXER UNIT CO****.

TEL 386-400553-1 FLAT CABLE ASSY

TEL 386-400554-1 FLAT CABLE ASSY

TEL 386-400597-1 SENSOR ASSY

TEL 386-400598-3 HEAD DOWN & ENG

TEL 386-400600-1 VAC SENSOR HARNESS

TEL 386-400604-1 6" AD CUP DOWN SENSOR

TEL 386-400633-1 SCRUBBER TRM OUT SENSOR

TEL 386-400634-1 SCRUBBERVAC SENSOR

TEL 386-400641-1 SCRUBBER TRM IN SENS.

TEL 386-400644-1 WAFER SENSOR HARNESS

TEL 386-401515-1 IN BELT MOTOR MAR

TEL 386-401516-1 OUT BELT MOTOR MARNE

TEL 386-401753-1 TRM UP/DOWN SENSOR HARNESS

TEL 386-401797-1 COOLING U/D SENSOR

TEL 386-402174-2 M/C UNIT (1) CABLE

TEL 386-402175-2 M/C UNIT (2) CABLE

TEL 386-431106-2 I/O BOARD

TEL 386-433121-2 L/R SCAN 1 UP/DOW

TEL 386-439020-2 CARRIER **** ARM MOTOR A

TEL 386-439025-2 MOTOR

TEL 386-439030-3 ARM Y MOTOR ASSY

TEL 386-439031-3 ARM VAC SENSOR ASSY C/S

TEL 386-439032-3 SENSOR

TEL 386-439073-3 MAIN ARM Y.B.P. SENSOR ASSY

TEL 386-439074-3 MAIN ARM Y ENCODER ASSY

TEL 386-439085-2 MOTOR

TEL 386-439097-2 AL STAGE WAF SENSOR

TEL 386-439152-2 MOTOR

TEL 386-439153-2 MOTOR

TEL 386-439154-2 SENSOR

TEL 386-439154-3 SPIN MTR SCAN ARM

TEL 386-439155-5 NOZZLE HEAD SENSO

TEL 386-439159-3 ROTARY ACTUATOR

TEL 386-439225-3 ARM, PAUSE, SW, ASSY

TEL 386-439377-4 M/A FLEX CABLE

TEL 386-439489-2 SIDE RINSE

TEL 386-439511-4 SVM DRIVE CABLE (7CM)

TEL 386-439606-1 SIPINNER SIGNAL 2FLAT CABLE

TEL 386-439612-3 SPINNER DC POWER CABLE

TEL 386-439680-5 SUM DRIVE CABLE (MATSUSHITA)

TEL 386-439956-3 M/A Y ENCODER ASSY (M4)

TEL 386-440044-1 MAP SENSOR (TR) ASSY

TEL 386-440472-2 SENSOR I/P BOARD

TEL 386-440786-2 CYLINDER SCAN I/O SENSOR

TEL 386-440791-2 SENSOR ASSY NOZZLE

TEL 386-441585-2 MOLEX 6P CABLE

TEL 386-442263-1 EE CCD LD ASSY

TEL 386-442566-2 SENSOR, 8 INCH WEE AXIS

TEL 386-442665-2 STEPPER I/F CABLE

TEL 386-442721-2 MOTOR, 8 INCH, WEE AXIS

TEL 386-442722-1 MOTOR, 8 INCH, WEE theta AXIS

TEL 386-443278-02 SPRING SUPPORT CABLE ASSY

TEL 386-443278-2 MA SPRING CABLE

TEL 386-4939426-3 M/A FLEX CABLE

TEL 387-400189-2 INDEXER SW HARNESS, 6 INCH

TEL 387-400319-1 LIQUID END DETECTOR

TEL 393-700670-4 ALARM ANALYZER BOX

TEL 3A-FN0104522 RORZE WAFER TRANSFER CERAMIC ARM

TEL 3AS0143010 AIR CYLINDER

TEL 3M10-101098-14 RING BASE

TEL 3M10-101101-12 PLATE,SUSCEPTER,3TAO

TEL 3M10-101182-11 CLAMP RING

TEL 3M10-101580-12 RING,ATTACHIMENT OP3

TEL 3M10-202183-12 TIN, 8IN NON CNT NO

TEL 3M10-307384-11 LIFTER PIN 300DSC WIDE

TEL 3M10-309663-11 QARTS PIN LIFTER 3TAO

TEL 3M10-405093-11 SPRING, FIT C-22

TEL 3M10-405839-11 C-RING BOTTOM COVER PIN 300

TEL 3M10-407411-11 STOPPER,COVER PIN

TEL 3M10-407431-11 HOLDER,SUSCEPTER,3TAO

TEL 3M10-407876-12 BOLT,SHOULDER SH

TEL 3M10-410242-11 PIN,SFR SUPPORT

TEL 3M10-410595-11 PIN,CB HOTLINER SUPP

TEL 3M10-451439-11 SHEET HEAT CONDUCTER-0.5

TEL 3M80-000727-13 TC

TEL 3M80-000728-13 TC

TEL 3M86-028633-11 CA,ASSY WTR LEAK,SHOWER

TEL 3M87-019502-12 ASSEMBLY, PV62 TRAP BACK VLV

TEL 3M87-029068-16 SHOWER ASSY,300TL

TEL 3M87-041475-11 PERTIER UNIVERSAL ASSY

TEL 3S10-401601-11 PIN,WAFER SUPPORT

TEL 3S80-000199-11 MANOMETER,1000 TORR

TEL 3S80-000200-11 MANOMETER,10 TORR

TEL 3S80-000307-11 ARC,300MM EDGE HEAT

TEL 3TB0006230 TIMING BELT 037-XL-0093A-J

TEL 3TB0038500 TIMING BELT FOR CDV GEN. USE 126X037

TEL 3TB0045110 TIMING BELT 150XL075

TEL 4-4-V1HBV1-SSR1.70-PE 1/4 VCR CLOSE COUPLING

TEL 410-217029-1 COMB, TRANSFERS

TEL 4103156213 COMB, PUSHER, 1

TEL 4103156213 COMB, PUSHER, 1

TEL 413182-002 RING

TEL 413182-006 RING

TEL 413182-008 RING

TEL 413182-009 RING

TEL 413182-010 RING

TEL 42755-0700 CU, KIT, SHIELD, SPUT

TEL 44B7767 EXTRACTION ELECTRODE INSULATOR

TEL 450001 VALVE MAKE UP WATER

TEL 47-442-VFS-P 1/4 VCR CLOSE COUPLING

TEL 481-501620-2 PCB, I/O COUNTER

TEL 481-501621-3 I/O DRIVER

TEL 481-501622-4 PCB, PCL8

TEL 481-600806-1 PCB, POWER CONNECT

TEL 481-600973-2 PCB, I/O ISOLATION

TEL 4815000915 PCB, TSBX, S10

TEL 4K2263 UPPER COOLING PLATE

TEL 5-39-02680 O-RING

TEL 5-4696-310A PCB

TEL 50-1762-001 PLATE, SHOWER QTZ SB

TEL 501-00-15 BOARD, SEMY GIF, SAFETY

TEL 501-00-78 PCB, FIRING BOARD

TEL 501-01-18 AMPLIFIER, TC TYPE R

TEL 501-01-30 PCB

TEL 501-01-34 PCB

TEL 501-01-35 PCB, EXTERNAL DIGITAL INPUT BOARD

TEL 501-01-47 PCB, BOAT LOADER INTERFACE

TEL 5010-202984-11 CHUCK(SS)

TEL 5010-210339-11 FORK(X1)

TEL 5010-210340-11 FORK(X2)

TEL 5010-210341-11 FORK(L)

TEL 5010-210342-11 FORK(R)

TEL 5010-316175-11 BAR(COT-D304)

TEL 5010-317625-11 BAR(TCT)

TEL 5010-410589-11 PACKING

TEL 5010-411333-11 PIN(COT-INNER)

TEL 5010-411843-11 PIN(COT-UPPER)

TEL 5010-412516-11 PIN, POSITION

TEL 5010-414421-11 PIN

TEL 5021350 CYL, HIVAC, LL, UHV

TEL 5022290 ACTUATOR,ROT,AIR,1"

TEL 505647 8 HOLE RING

TEL 5080-191952-11 LAMP

TEL 5085-401581-11 FORK ASSY.CRA

TEL 5085-427417-11 CHECK ASSY

TEL 518559 BELLOWS, BIG, UNITY II

TEL 54440-E039 PULSE MOTOR DRIVE UNIT( ROBOTARM)

TEL 550-061A QUARTZ RING A

TEL 564-307570 PCBOARD (MC31027&MC31026)

TEL 567-1138 ELECTROSTATIC LOADER ARM (CD-SEM)PHS

TEL 567-3619 CHUCK STAGE ASSEMBLY

TEL 600-1001-P30 CABLE

TEL 600-1002-P50 CABLE, RS485

TEL 600-1003-P1 CABLE

TEL 600-1008-P15 CABLE

TEL 600-1008-P15 CABLE

TEL 6000-8546 PCB SYSTEM CO****OLLER BOARD SYS286CONT

TEL 697ZZ YUASA ROBOT BEARING

TEL 701B8 SPEED CO****OLLER

TEL 715-330135-001 GAS RING

TEL 715-46053-001 GROUNDING BLOCK,ELECTRODE,STRIP CHAMBER

TEL 715-8010522-001 BASE PLATE

TEL 7205477-0001 ANA LOCK CO****OLLER TYPE A/B

TEL 7310-3516-01 LAMP ANNEALTC WAFER 1501TYPE

TEL 780-05155-200 KIT,GEM/SECS II,V2.0,81XX

TEL 780136764 FILTER ELEMENT FA-550911UKWS70820

TEL 80-2010 BOARD, CIRCUIT

TEL 80-2030 BOARD, CIRCUIT

TEL 80-2040 PCB, ASSY, VALVE DRIVER

TEL 80-2060A BOARD, CIRCUIT

TEL 800140036 APERTURE 6.0ST1.5PJS

TEL 800213033 APERTURE MB101199(01)-6*0.02T0.5U(PART

TEL 800400930 RING CE**** NW100

TEL 8008743 ILLUMINATIONLAMP12V100WHLX64625

TEL 802050A BOARD, CIRCUIT

TEL 802050C BOARD, CIRCUIT

TEL 8043069G002 FREQUENCY CONVERTER

TEL 810-08727 EXHAUST RING, QUARTZ, 8K-ESC

TEL 810-120008-6 UPPER ELECTRODE BODY

TEL 810-120087-1 TE400 LOWER

TEL 810-120375-4 BODY ELECTRODE, UPPER. (CP11)

TEL 810-220047-8 UPPER CLEANING PLATE (D)

TEL 810-220135-1 OUTER GATE

TEL 810-220223-6 EXHAUST RING

TEL 810-220223-6 EXHAUST RING

TEL 810-220296-1 5"EXHAUST RING 5" (5-BL)

TEL 810-220333-2 RING, CLAMP 6" (JEIDA) (AL203)

TEL 810-220486-5 DEPO SHIELD

TEL 810-220666-2 DEPO SHIELD(8K) (ALUMINA)

TEL 810-220666-4 SHIELD

TEL 810-220689-1 PLATE, BAFFLE

TEL 810-220690-2 PLATE, BAFFLE

TEL 810-220690-2 PLATE, BAFFLE

TEL 810-220725-2 EXHAUST RING (6-BL)

TEL 810-220734-1 COOLING PLATE (C-11)

TEL 810-220734-2 EXHAUST RING

TEL 810-320013-6 UPPER INSULATOR

TEL 810-320068-1 BAFFLE H

TEL 810-320069-1 BAFFLE

TEL 810-320252-2 SENSOR HOUSING

TEL 810-320259-1 GUARD RING

TEL 810-320310-3 VACUUM TWEEZERS

TEL 810-320648-2 CERAMIC RING

TEL 810-321095-1 A 1070 FOCUS RING

TEL 810-321139-1 GUARD RING

TEL 810-321230-1 BAFFLE (BX-1)

TEL 810-321231-1 BAFFLE

TEL 810-321311-2 YMS-9600

TEL 810-321311-4 WAFER LIFTER B

TEL 810-321369-3 WAFER HOLDER

TEL 810-321371-4 H/A PIN SET (8)

TEL 810-321640-1 GUARD RING(8K-ESC)

TEL 810-321640-1 GUARD RING(8K-ESC)

TEL 810-321649-4 VACUUM PIN SET 2

TEL 810-321735-5 ELECTRODE SHIELD RING

TEL 810-400034-1 ADJUST PIN

TEL 810-420062-1 SUPPORT

TEL 810-420063-4 WINDOW

TEL 810-420072-1 LANTERN RING

TEL 810-420074-1 WASHER (PACK OF 10)

TEL 810-420075-3 LIFTER SPRING

TEL 810-420129-1 BAFFLE

TEL 810-420139-1 CLAMP SHAFT DAMPER

TEL 810-420149-1 CERAMIC PIN

TEL 810-420158-4 WAFER LIFTER

TEL 810-420168-1 SUPPORT GUIDE

TEL 810-420174-2 LIFTER SUPPORT

TEL 810-420190-1 GATE ROLLER

TEL 810-420210-1 COLLAR 4- 5.6

TEL 810-420212-1 RING, LENTERN A

TEL 810-420321-1 CYLINDER END

TEL 810-420323-1 GUIDE SHAFT

TEL 810-420326-1 REAR WINDOW

TEL 810-420526-1 PLUG (S) (PACK OF 10)

TEL 810-420526-1* PLUG (S)

TEL 810-420595-1 RF CONNECTOR

TEL 810-420605-2 GAS INLET 92 S

TEL 810-420715-1 GATE CONNECT BLOCK

TEL 810-420776-1 INNER BLOCK SPACER

TEL 810-420812-1 TEMP SENSOR HOLDER (BN)

TEL 810-420967-2 CONNECTOR SUPPORT

TEL 810-420986-1 RF ADAPTER